PVD
TRV ENGINEERED CHM LATCH
TRV has built a strong reputation as a leading supplier of precision latch assemblies for semiconductor manufacturing. Our engineering team collaborates directly with fab engineers to understand root causes of wafer breakage—delivering innovative solutions that solve real production challenges.
The CHM Latch Advantage
Decades of industry experience have demonstrated that conventional bearing mechanisms are unreliable in high-temperature wafer handling environments. As a result, we engineered the CHM latch to eliminate intermittent failures found in all bearing latch assemblies.
The design provides improved service life and thermal performance compared to conventional bearing-based systems, without the added cost typically associated with fully ceramic solutions.
Consistent spring force
Every CHM latch assembly is individually tested for spring force to customer specifications prior to shipment. This ensures:
- Consistent force across all units
- Tight tolerance compliance
- Optimal wafer handling performance
- Repeatable, reliable operation
Precision Spring Design
Our springs are engineered with tight-tolerance wire diameter, heat-treatment and pitch control to ensure consistent spring rate and uniform force distribution across the wafer surface.
Critical specifications
- Precision wire diameter – maintains exact load characteristics
- Controlled pitch – delivers even force transmission without hotspots
- Optimized end condition – ensures stable, perpendicular load application
- Targeted heat treatment – locks in dimensional stability and fatigue resistance for repeatable performance
Result: Predictable, constant force that minimizes wafer stress, prevents chipping, and maintains yield integrity through extended cycle life.
Stainless Steel Latch Assembly: High Precision Ball Bearings
Engineered for Extreme Performance
Our high precision ball bearings deliver exceptional accuracy and reliability for demanding applications where standard bearings fall short. Designed with advanced materials and precision engineering, these bearings maintain tight tolerances and superior performance under challenging operating conditions.
Key Specifications
| Feature | Specification |
| Precision Grade | ABEC 5 (Class 5) |
| Radial Play | .0002″ – .0005″ |
| Lubrication | Dry Lube (Solid Film) |
| Materials | Ceramic or Stainless Steel |
Product Features
ABEC 5 Precision
Tight dimensional tolerances and running accuracy for high-speed, high-precision applications. Ensures minimal runout, reduced vibration, and consistent rotational performance.
Dry Lube Technology
Solid film lubrication eliminates oil and grease—ideal for:
- Vacuum environments
- Clean room operations
- High-temperature applications (ceramic material)
- Contamination-sensitive processes
Material Options
Ceramic (Silicon Nitride)
- Superior hardness and wear resistance
- Corrosion proof
- Non-magnetic
- Extended service life in harsh conditions
Stainless Steel (440C or equivalent)
- Excellent corrosion resistance
- High strength and durability
- Cost-effective precision solution
Tight Radial Play Control
Controlled internal clearance (.0002″–.0005″) ensures:
- Minimal axial and radial displacement
- Enhanced positional accuracy
- Reduced noise and vibration
- Optimal preload compatibility
Quality Assurance
- 100% dimensional inspection
- Rotational accuracy testing
- Material certification available
- Lot traceability
Ideal Applications
- Medical & Dental Equipment – Surgical tools, imaging systems, diagnostic devices
- Semiconductor Manufacturing – Wafer handling, clean room robotics
- Aerospace & Defense – Avionics, guidance systems, satellite components
- Food Processing – Washdown-safe machinery, packaging lines
- Scientific Instruments – Spectrometers, centrifuges, precision stages
- Robotics & Automation – High-repeatability positioning systems
Need a specific size or configuration?
Contact our engineering team for custom solutions tailored to your exact specifications.
Engineering Excellence
TRV delivers precision-engineered wafer holder assemblies tailored to your specific tool and process requirements.
NOTE: CONTACT US TODAY TO INQUIRE ABOUT SPECIFIC TYPES AND AVAILABILITY. (4”, 5”, 6”, 8”)
Engineering Excellence
Our deep expertise spans critical manufacturing disciplines:
- Precision machining for dimensional accuracy
- Advanced heat treatment for material stability
- Flatness control to prevent component warping
- Material selection optimized for thermal and mechanical performance
This integrated approach helps fabs eliminate costly wafer breakage and chipping caused by warped or improperly specified components.
Precision Leaf- Spring Design
Leaf springs are produced with consistent thickness, tight tolerance and specific heat treatment process ensuring reliable, repeatable performance across production cycles and maintenance events.
Each leaf spring is individually tested to ensure the complete assembly delivers uniform force distribution to the backplane heater.
Clamp ring flatness inspection
In-house precision measurement confirms every ring meets specification.
Teflon insulators
TRV manufactures Teflon insulators in various configurations (RMX 10, SPA 10, RMX12, SPA 12, RM12HP) for vacuum-based semiconductor processes. Each insulator is machined to precise tolerances for secure, stable fit—accounting for thermal expansion to maintain integrity across temperature variations.
Manufactured and inspected in tightly temperature-controlled environments, our Teflon insulators deliver:
- Superior chemical resistance in aggressive process environments
- Low friction and non-stick properties for clean operation
- Dimensional stability for precise, repeatable fit
Customized Shield Kits
Particles within process chambers directly impact semiconductor wafer yield. TRV offers shield kits tailored to your specific process requirements, with different coating options engineered for distinct chamber environments:
Process-matched performance: Select the optimal coating for your specific wafer processing conditions—improving yield and extending maintenance intervals.
Pre-configured convenience: Each kit contains all necessary components—like pod shield, wafer holder shield, plenum shield, bell jar adapter shield etc—matched and ready to install together. No part compatibility issues, reduced downtime.
Simplified supply chain: Single-source procurement with consistent quality and predictable lead times.
Seal Ring Kit Option
We offer flexible purchasing solutions for seal ring assemblies. Choose individual components separately—or select a complete kit containing all necessary parts for full assembly replacement. Our kit option simplifies procurement with one part number, ensuring matched compatibility and reducing ordering complexity for maintenance teams.